Listar por tema "Focus-Error-Signal"
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Simultaneous measurement of deformation and thickness change in polymer films
(2006-08-14)We present experimental results in deformation measurement and thickness change in polymer films employing Fourier domain interferometry. The set-up is a Michelson configuration in which interference signal betweeen light ... -
Transparent glass slab thickness measurement by binary-spot focus signal
(2019-12-12)Focus error systems based on the astigmatic principle relying on four quadrant photo detectors as the signal generation element have widely been used in many different applications. Nevertheless, its working principle ...