2020-02-102020-02-102006-08-14Eneas N. Morel and Jorge R. Torga "Simultaneous measurement of deformation and thickness change in polymer films", Proc. SPIE 6293, Interferometry XIII: Applications, 62930R (14 August 2006); https://doi.org/10.1117/12.680546http://hdl.handle.net/20.500.12272/4284We present experimental results in deformation measurement and thickness change in polymer films employing Fourier domain interferometry. The set-up is a Michelson configuration in which interference signal betweeen light reflected from a reference arm is superposed with two reflection from the first and second interface from the film sample. Distance measurements for determination of deformation and thickness values were obtained after an inverse Fourier transform of the spectrum signal. With this configuration, measurements with 1 micron axial resolution, and 2mm dynamic range were obtainedapplication/pdfenginfo:eu-repo/semantics/openAccesshttp://creativecommons.org/licenses/by-nc-sa/4.0/Focus-Error-Signalastigmaticthicknessbeam profilometermultiple spotsinfo:eu-repo/semantics/articleTorga, JorgeAtribución - No Comercial - Compartir Igual (by-nc-sa)Atribución-NoComercial-CompartirIgual 4.0 Internacional10.1117/12.680546