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Simultaneous measurement of deformation and thickness change in polymer films

dc.creatorTorga, Jorge Román
dc.creatorMorel, Eneas Nicolás
dc.date.accessioned2020-02-10T22:43:47Z
dc.date.available2020-02-10T22:43:47Z
dc.date.issued2006-08-14
dc.identifier.citationEneas N. Morel and Jorge R. Torga "Simultaneous measurement of deformation and thickness change in polymer films", Proc. SPIE 6293, Interferometry XIII: Applications, 62930R (14 August 2006); https://doi.org/10.1117/12.680546es_ES
dc.identifier.urihttp://hdl.handle.net/20.500.12272/4284
dc.description.abstractWe present experimental results in deformation measurement and thickness change in polymer films employing Fourier domain interferometry. The set-up is a Michelson configuration in which interference signal betweeen light reflected from a reference arm is superposed with two reflection from the first and second interface from the film sample. Distance measurements for determination of deformation and thickness values were obtained after an inverse Fourier transform of the spectrum signal. With this configuration, measurements with 1 micron axial resolution, and 2mm dynamic range were obtainedes_ES
dc.formatapplication/pdfes_ES
dc.language.isoenges_ES
dc.rightsinfo:eu-repo/semantics/openAccesses_ES
dc.rights.urihttp://creativecommons.org/licenses/by-nc-sa/4.0/*
dc.sourcehttps://www.spiedigitallibrary.org//conference-proceedings-of-spie/6293/62930R/Simultaneous-measurement-of-deformation-and-thickness-change-in-polymer-films/10.1117/12.680546.short?SSO=1es_ES
dc.subjectFocus-Error-Signales_ES
dc.subjectastigmatices_ES
dc.subjectthicknesses_ES
dc.subjectbeam profilometeres_ES
dc.subjectmultiple spotses_ES
dc.titleSimultaneous measurement of deformation and thickness change in polymer filmses_ES
dc.typeinfo:eu-repo/semantics/articlees_ES
dc.rights.holderTorga, Jorgees_ES
dc.description.affiliationFil: Torga, Jorge Román. Universidad Tecnológica Nacional. Facultad Regional Delta.; Argentinaes_ES
dc.description.affiliationFil: Morel, Eneas Nicolás. Universidad Tecnológica Nacional. Facultad Regional Delta.; Argentinaes_ES
dc.description.peerreviewedPeer Reviewedes_ES
dc.relation.datasethttps://www.spiedigitallibrary.org//conference-proceedings-of-spie/6293/62930R/Simultaneous-measurement-of-deformation-and-thickness-change-in-polymer-films/10.1117/12.680546.short?SSO=1es_ES
dc.type.versioninfo:eu-repo/semantics/publishedVersiones_ES
dc.rights.useAtribución - No Comercial - Compartir Igual (by-nc-sa)es_ES
dc.rights.useAtribución-NoComercial-CompartirIgual 4.0 Internacional*
dc.identifier.doi10.1117/12.680546


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