Wide band interferometryforthicknessmeasurement
Date
2003Author
Constantino, Santiago
Martínez, Oscar
Torga, Jorge
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In thisworkwepresentthe concept of wide band interferometry
as opposed to white-light interferometry to introduce a thickness
measurementmethodthatgainsprecisionwhenthebandwidthisreduced to
anadequatecompromise in order to avoidthedistortionsarisingfromthe
material dispersion. The use of thewidestpossible band is a well
established dogma whenthehighestresolutionisdesired in distance
measurementswithwhite-light interferometry. Wewill show thatthe dogma
fallswhenthicknessmeasurementsmust be carriedoutdue to material
dispersion. In factthe precise knowledge of thefrequencydependence of
therefractiveindexisessentialforadequatethicknessretrievalfromthe
opticalexperiments. Thedevicewepresentisalsouseful to obtainthegroup
refractiveindexthatisnecessary to calculatetheabsolutethicknessvalue.
As anexample, we show thespreading of a siliconeoilon a reference
surface in real time.
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