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Fast scanner with position monitor forlargeopticaldelays
(2001-11-01)
Wepresent a new fastscansystemthatemploys a stepper motor used in a single steposcillatingmode and a position monitor devicebasedon a diode laser. Thesetupusedgeneratesdelays as large as 105 ps at 10 Hz, with 100% dutycycle. ...
Wide band interferometryforthicknessmeasurement
(2003)
In thisworkwepresentthe concept of wide band interferometry
as opposed to white-light interferometry to introduce a thickness
measurementmethodthatgainsprecisionwhenthebandwidthisreduced to
anadequatecompromise in order ...