Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer

Abstract

We present in this work a method to measure thicknesses of opaque samples. The technique combines the use of low coherence interferometry with a Michelson-Sagnac configuration. This ring set-up let us to measure both faces of the sample simultaneously. So it is possible to obtain the thickness by measuring the optical path difference between a reference and both surfaces of the sample. Experimental results up to 1mm are shown in metal gauge block. A resolution better than 10 micronswas obtained.

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Keywords

UTN, Facultad Regional Delta, Coherence Interferometry, Michelson-Sagnac configuration

Citation

E.N. Morel, J.R. Torga. (2009) Dimensional characterization of opaque sampleswith a ring interferometer. Optics and Lasers in Engineering 47:5, 607-611.Online publication date: 1-May-2009

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Except where otherwised noted, this item's license is described as info:eu-repo/semantics/openAccess