Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer

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dc.creatorMorel, Eneas Nicolás
dc.creatorTorga, Jorge Román
dc.date.accessioned2020-07-17T19:21:47Z
dc.date.available2020-07-17T19:21:47Z
dc.date.issued2008-04-24
dc.description.abstractWe present in this work a method to measure thicknesses of opaque samples. The technique combines the use of low coherence interferometry with a Michelson-Sagnac configuration. This ring set-up let us to measure both faces of the sample simultaneously. So it is possible to obtain the thickness by measuring the optical path difference between a reference and both surfaces of the sample. Experimental results up to 1mm are shown in metal gauge block. A resolution better than 10 micronswas obtained.es_ES
dc.description.affiliationFil: Morel, Eneas Nicolás. Universidad Tecnológica Nacional. Facultad Regional Delta. Investigación, Ciencia y Tecnología. CENES. Grupo de Nanofotónica; Argentina.es_ES
dc.description.affiliationFil: Torga, Jorge Román. Universidad Tecnológica Nacional. Facultad Regional Delta. Investigación, Ciencia y Tecnología. CENES. Grupo de Nanofotónica; Argentina.es_ES
dc.formatapplication/pdfes_ES
dc.identifier.citationE.N. Morel, J.R. Torga. (2009) Dimensional characterization of opaque sampleswith a ring interferometer. Optics and Lasers in Engineering 47:5, 607-611.Online publication date: 1-May-2009es_ES
dc.identifier.doi10.1063/1.2926972
dc.identifier.urihttp://hdl.handle.net/20.500.12272/4481
dc.language.isoenges_ES
dc.relation.referenceshttps://aip.scitation.org/doi/citedby/10.1063/1.2926972es_ES
dc.rightsinfo:eu-repo/semantics/openAccesses_ES
dc.rights.holderMorel, Eneas Nicoláses_ES
dc.rights.urihttp://creativecommons.org/licenses/by-nc-sa/4.0/*
dc.rights.uriAtribución-NoComercial-CompartirIgual 4.0 Internacional*
dc.rights.useAtribución–No Comercial–Compartir Igual (by-nc-sa)es_ES
dc.sourceDimensional characterization of opaque sampleswith a ring interferometer. Optics and Lasers in Engineering 47:5, 607-611.Online publication date: 1-May-2009.es_ES
dc.subjectUTNes_ES
dc.subjectFacultad Regional Deltaes_ES
dc.subjectCoherence Interferometryes_ES
dc.subjectMichelson-Sagnac configurationes_ES
dc.titleSimple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometeres_ES
dc.typeinfo:eu-repo/semantics/conferenceObjectes_ES
dc.type.versioninfo:eu-repo/semantics/publishedVersiones_ES

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